针对多通道柔性神经微电极的设计及制作，研究了微电极的加工工艺。采用一种新型的柔性聚合物材料——聚对二甲苯(parylene C)作为微电极的基底和绝缘材料，借助微细加工技术，制作了36通道(按6×6矩阵排列)的柔性神经微电极，微电极的尺寸分别为Φ150 μm(圆形)和150 μm×150 μm(方形)，电极引线线宽为30 μm。无论微电极为圆形或方形，表面均平整光滑、轮廓清晰。电学性能测试结果表明，1 kHz时微电极的阻抗仅为7 kΩ左右，且随着频率的增加，阻抗逐渐降低，呈明显高通特性。微电极加工质量较好，电学性能优良，实现了微电极和柔性基底的集成，有利于高效率批量制作，为视觉假体中柔性神经接口的研制奠定了基础。

Multichannel flexible neural microelectrodes were designed and fabricated,and their fabrication processes were also studied. A microfabrication technology was introduced to manufacture flexible microelectrodes based on a new flexible substrate material, parylene C, due to its excellent electrical insulating, mechanical and biocompatible properties,and a 36-channel flexible neural microelectrode was fabricated with the arrangement in a 6×6 square grid pattern. The size of microelectrode was Φ150 μm (circular) and 150 μm×150 μm (squre), respectively,and the line width of metal trace was 30 μm. It was found that the microelectrode shows a smooth surface and a distinct outline.A electrtical test indicates that the impedance of microelectrode is only 7 kΩ or so, and it reduceds as frequency increasing, which is an excellent high-pass behavior.Moreover, the microelectrode and a flexible substrate can be integrated by the microfabrication technology.The microelectrode is suitable for the application in retinal prostheses, for it has a good quality and excellent electrical properties.