为满足精密位移的需要，研究开发了一种大行程、纳米级和计量型三维精密位移系统。采用模块化结构设计，即3个方向的驱动机构均采用完全相同的设计结构，分别称为X、Y、Z向一维工作台。位移系统在X、Y、Z 3个方向采用粗、精两级驱动，并分别装有计量光栅。各方向粗驱动采用交流伺服电机配合精密丝杠和直线导轨进行，精驱动采用压电陶瓷微位移器配合柔性铰链进行，每个方向的两级驱动共用一套计量光栅，从而保证了位移系统的大行程、纳米级和计量型。介绍了位移系统的结构设计，分析了位移系统的位移分辨率、计量原理以及它的运动性能。实验表明，在40 mm位移行程内，X、Y和Z向工作台两级驱动实际位移与设定位移之差分别不超过±0.030、±0.028和±0.033 μm，验证了位移系统设计的有效性，为位移系统的设计提供了依据。

A novel 3D precision displacement system of large travel, nanometer level and displacement measurement by itself is developed to satisfy the need of precision displacement. The system is designed with a modular structure, in which the driving mechanisms of three directions adopt the same design structure and calls as X direction, Y direction and Z direction 1D worktables, respectively. The dual-stage actuators of coarse and fine driving have been applied in the precision displacement system in X, Y and Z directions and three sets of metrology gratings are installed in X, Y and Z directions respectively. In every direction,the AC servomotor combining with a precision lead screw and a linear guide is used to actuate the coarse driving,and a piezoelectric micro-displacement actuator combining with a flexure hinge is used to actuate the fine driving and then a set of metrology grating is set for the displacement measurements of the coarse driving and fine driving. Therefore the need of large travel, nanometer level and displacement measurement by itself of the displacement system can be satisfied. The structure design of the displacement system is introduced and the displacement resolution, measuring principle and the motion performance of this displacement system are also analyzed in details. Experiments indicate that the displacement difference between actual and setting are no more than ±0.030,±0.028 and ±0.033 μm respectively in X, Y and Z worktables in a range of 40 mm, which verifies the effectiveness of design of the displacement system and provides the theoretical basis for its development.