从光线传播的角度分析了非周期多层膜Kirkpatrick-Baez(KB)显微镜的成像性能, 并与单层膜KB显微镜、周期多层膜KB显微镜进行了对比。与单层膜KB显微镜相比, 多层膜KB显微镜提高了工作掠入射角度, 在同样分辨力和集光效率要求下具有更大的视场。周期多层膜KB显微镜的反射率和能量分辨本领高于非周期多层膜KB显微镜, 但非周期多层膜元件具有较大的角度带宽和均一的反射率, 克服了周期多层膜KB显微镜视场范围和像场均匀性的不足。在此基础上, 制备了中心角度1.133 0°的非周期多层膜反射镜元件, 以8 keV能量的X射线光管为背光源进行了KB显微镜成像实验, 实验结果与理论分析一致。

The imaging characteristic of non-periodic multilayer Kirkpatrick-Baez(KB) microscope is analyzed based on propagation of rays, and contrasted with single layer and periodic multilayer KB microscopes. Compared with single layer KB microscope, multilayer KB microscope has bigger grazing angle, and wider field of view at the same resolution and collection efficiency. The reflectivity and energy resolution of periodic multilayer KB microscope is better than that of non-periodic multilayer KB microscope, but the non-periodic multilayer element has wider angular bandwidth and more uniform reflectivity, which improves the field of view and uniformity of image. The non-periodic multilayer mirrors with a grazing angle of 1.133 0° possess 0.3° angular bandwidth. Backlit by 8 keV X-ray tube, the imaging experiment with non-periodic multilayer KB microscope was performed, and the results consist with theoretical analysis.