强激光与粒子束, 2010, 22 (8): 1785, 网络出版: 2010-09-15   

非对称波导结构提高980 nm激光二极管电光效率的机理研究

Mechanisms of high efficiency for 980 nm diode lasers with asymmetric waveguide structure
作者单位
1 中国科学院 半导体研究所, 光电子器件国家工程中心, 北京 100083
2 华北电力大学 可再生能源学院, 北京 102206
摘要
采用高电流注入条件下的载流子扩散方程和复折射率波导模型情况下的亥姆霍兹方程, 对980 nm高功率激光二极管外延材料的非对称和对称波导结构的光吸收损耗进行了理论计算。采用低压金属有机化学气相外延技术制备了两种波导结构的外延材料, 并制作了激光器件, 进行了光电特性测试和对比分析。理论计算和实验结果表明:与对称波导结构相比, 非对称波导结构外延材料并未减小光吸收损耗, 而是减小了串联电阻, 因而降低了器件的焦耳热损耗, 从而提高器件的电光效率。
Abstract
The optical losses of asymmetric and symmetric waveguide structures were calculated theoretically for high power 980 nm diode lasers, by means of the continuity equation under strong injection and the Helmholtz equation of complex refractive index model. The epitaxial materials of the both waveguide structures were prepared by the metallorganic chemical vapor deposition growth technique, and corresponding laser devices were fabricated. The electro-optical performances of both devices were measured and analyzed by comparison. The theoretical calculations and experimental results indicates that, the asymmetric waveguide structure material does not reduce the optical loss, but decreases the series resistance of the diode, therefore, it reduces the joule heating, and enhances the conversion efficiency.

王俊, 白一鸣, 刘媛媛, 崇锋, 熊聪, 王翠鸾, 冯小明, 仲莉, 刘素平, 马骁宇. 非对称波导结构提高980 nm激光二极管电光效率的机理研究[J]. 强激光与粒子束, 2010, 22(8): 1785. Wang Jun, Bai Yiming, Liu Yuanyuan, Chong Feng, Xiong Cong, Wang Cuiluan, Feng Xiaoming, Zhong Li, Liu Suping, Ma Xiaoyu. Mechanisms of high efficiency for 980 nm diode lasers with asymmetric waveguide structure[J]. High Power Laser and Particle Beams, 2010, 22(8): 1785.

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