利用高功率横流CO2激光器，研究了高速激光加工条件下，激光功率的微观波动对材料加工质量的影响，分析了加工质量与加工速度的关系，讨论了高速加工条件下激光束质量的评价指标。结果表明，高功率横流CO2激光器采用直流激励，由于直流激励主、副电源的整流、叠加效应，使电压、电流产生300 Hz波动，导致激光功率产生300 Hz的波动。低速加工时对加工质量的影响可忽略不计，但当高速加工时，将产生300 Hz的深浅、宽窄变化。因此应针对高速、高质量加工的需要，提出“时间光束质量”评价指标。

Utilizing transverse flow CO2 laser, the influence of micro-fluctuation of laser power to processing quality is studied under high speed laser processing. The relationship between processing quality and processing velocity is analyzed, and evaluation of laser beam quality is discussed. The result indicates that the fluctuation frequency of voltage/current of high power transverse-flow CO2 laser is 300 Hz when stimulated by direct current power supply, which resulted in laser power fluctuation of 300 Hz. The influence of the fluctuation to processing quality can be ignored under lower speed processing, but the fluctuation will affect processing quality under high speed processing. Aiming at the processing of high quality and high speed, the evaluation standard of time-beam-quality should be brought up.