为了在熔融石英基体内制作出高质量的微通道，分别用调Q的Nd∶YAG脉冲激光器输出的基频光(1064nm)和经过倍频晶体后的混合光(倍频光为70%，基频光为30%)辐照熔融石英玻璃，通过诱导等离子体加工微通道，并初步分析了基频光与混合光加工产生差别的原因。结果表明，用混合光加工的通道内壁较光滑，加工速度快，所加工的通道最深达8mm。

In order to fabricate high-quality micro channels in a fused silica, the fundamental frequency laser of a Q-switched Nd∶YAG laser at 1064nm and the mixing laser composed of 70% second harmonic laser and 30% fundamental frequency laser were used to irradiate a fused silica substrate respectively to induce the plasma, by which micro channels in a fused silica substrate were fabricated. And the reasons for difference between two kinds of processing methods were analyzed. The results show that the interior wall of the channels processed by mixing laser are smoother and its drilling rate is faster than that processed by fundamental frequency. Furthermore, the depth of the channels processed by the mixing laser is up to 8mm.