对于准分子激光角多路主振荡功率放大器(MOPA)系统, 脉冲串能量提取对确定光束路数、降低系统复杂性具有实际意义, 然而脉冲串放大实验对光路准直有着严格的要求。根据近场调节平移、远场调节角移的原理进行了光路自动准直设计, 编写了闭环控制软件, 利用He-Ne光进行了原理性实验, 获得了平移21 μm, 角移1.3″的调节精度, 并将此系统应用于双脉冲串放大实验的光路准直, 效果良好。

In angular multiplexing excimer laser system, studies on energy amplification of a train of laser pulses are crucial to determine beam number for reducing optical complexity, while strict requirements on alignment are needed for experiments. Based on principles of displacement and angular drift adjusted by near field and far field respectively, an optical automatic alignment system is designed, and corresponding computer software for closed-loop feedback controll is compiled. High adjustment accuracy with allignment errors of 21 μm in near field and 1.3″ in far field is obtained by using He-Ne laser. This system is applied to two pulse amplification experiment and works effctively.