光学支撑镜架结构稳定性是影响光束定位精度的重要因素。基于光学法进行了镜架结构稳定性测量技术研究, 编写了光学稳定性测试软件,开展了对不同透镜和反射镜镜架结构稳定性测量。实验得到了镜架调节及调节后长时间的漂移量及漂移规律, 比较了不同种类和不同调节量情况下镜架的稳定性。实验建立的稳定性测试系统测量精度达到3.13 μm, 且使用方便, 为光学镜架稳定性提供了快速的检测手段, 并为高功率准分子激光系统镜架选型提供重要参考。

Optical mounts structure stability is crucial to beam position accuracy. The study on optical testing method for structure stability of mirror /lens mounts was involved and optical stability testing software was compiled. Structure stability of different kinds of mirror /lens mounts was measured. The variation of beam position drift versus time was experimentally obtained, and the comparison of stability properties among different kinds of mounts and different levels of adjustment were made. Stability test system was able to gives on accuracy of as high as 3.13 μm. A rapid and handy testing mean for stability of optical mounts was provided, and the results can be used as a key guide to optical mounts choice for high power excimer laser system.