研制了一种基于微光机电系统(MOEMS)技术的新型微型可编程光栅周期可调光栅。该光栅采用玻璃体上硅(SOG)加工工艺, 静电梳齿驱动, 具有操作简单、连续可调和宽调制等特点。该光栅在静电驱动力的作用下, 周期的变化引起特定级次下单色光衍射角的变化及复色光光谱的偏移。针对该光栅的衍射特性, 设计及搭建两套光学系统, 根据光栅结构设计参数的理论计算与测量结果基本一致, 充分表明该光栅能对光具有良好的调制作用。为该器件在微型光谱仪和光开关的应用提供了技术参考。

Based on the micro-opto-electro-mechanical systems (MOEMS) technology, a new micro programmable grating with tunable pitch is designed and fabricated by using silicon-on-glass (SOG) processing. The pitch-tunable grating has prominent advantages over the conventional optical devices such as simple operation, continuous adjusting, and wide modulation. The change of the grating pitch results in the change of monochromatic diffraction angle and chromatic wavelength. Then two experimental setups for practically measuring the change of monochromatic diffraction angle and chromatic wavelength are designed and established, respectively. The characteristics of the grating according to the designed structural dimensions agree very well with the experimental results, which proves that the grating has good modulation performances. This work lays a good foundation for the future research in micro spectrometers and optical communication and provides valuable technical references.