光学技术, 2010, 36 (6): 0857, 网络出版: 2010-12-07
基于共焦法透镜中心厚度检测的光学系统设计
Optical system design for the measurement of center thickness of lens based on confocal technology
摘要
光学透镜的中心厚度是光学系统中的一个重要参数, 其加工质量的好坏对光学系统的成像质量具有很大的影响。提出了一种基于共焦原理的非接触在线检测技术。系统的测量范围可达到9.8mm, 测量精度可达到14.7μm。
Abstract
The central thickness of optical lens is one of the most important parameters for optical systems, and its precision has great influence on the imaging quality. A technology of non-contact on line measurement based on confocal technology is provided. The measuring range of this system is 9.8mm, and the precision reaches 14.7μm.
乔杨, 张宁, 刘涛, 徐熙平. 基于共焦法透镜中心厚度检测的光学系统设计[J]. 光学技术, 2010, 36(6): 0857. QIAO Yang, ZHANG Ning, LIU Tao, XU Xiping. Optical system design for the measurement of center thickness of lens based on confocal technology[J]. Optical Technique, 2010, 36(6): 0857.
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