光学学报, 2010, 30 (12): 3398, 网络出版: 2010-12-07
基于钯及其复合膜的光纤氢气传感器特性研究
Research on Characteristic of Fiber Optic Hydrogen Sensor Based on Palladium and Its Composite Films
光纤光学 光纤氢气传感器 倏逝场 抛磨 磁控溅射 fiber optics fiber optic hydrogen sensor evanescent field polish magnetron sputtering
摘要
提出了一种新型光纤氢气传感器的制作方法。将光纤的包层侧边部分抛磨成“D”形状,用磁控溅射法在表面镀上钯(Pd)和Pd/WO3氢气敏感薄膜,制作出了倏逝场型光纤氢气传感器。实验结果表明,镀有Pd/WO3复合膜的传感器具有较好的线性关系和可重复性,单模光纤比多模光纤稳定性好。
Abstract
A novel fiber-optic hydrogen gas sensor is proposed. The side of fiber cladding is polished to "D" shape, Pd and Pd/WO3 hydrogen-sensitive films are coated on the polished surface by magnetron sputtering, then an evanescent field fiber-optic hydrogen sensor is fabricated. The results show that a sensor which has composite Pd/WO3 thin film has good linerarity and repeatability. Meanwhile, compared with multi-mode fiber, single-mode fiber is more reliable.
刘宏亮, 杨明红, 代吉祥, 李小兵, 廖招龙, 何伟. 基于钯及其复合膜的光纤氢气传感器特性研究[J]. 光学学报, 2010, 30(12): 3398. Liu Hongliang, Yang Minghong, Dai Jixiang, Li Xiaobing, Liao Zhaolong, He Wei. Research on Characteristic of Fiber Optic Hydrogen Sensor Based on Palladium and Its Composite Films[J]. Acta Optica Sinica, 2010, 30(12): 3398.