研究了电激励脉冲HF激光工作介质SF6/C2H6混合气体的放电特性。通过对放电等离子体荧光图像和放电波形的测量, 分析比较了不同条件下放电稳定性、剩余电压、能量沉积效率等特性参数的变化情况。实验结果表明: 混合气体的放电过程存在主放电、剩余电压维持和电弧放电3个阶段, 各阶段的放电特性有所差异; 提高充电电压有利于放电能量的有效沉积, 也会使不稳定的电弧放电提前; 增加C2H6原子分数能起到抑制电弧放电的作用; 混合气体总压的增加会导致剩余电压的提高以及辉光放电的能量沉积效率的降低; 最佳的能量沉积出现在电弧放电阶段与辉光放电阶段即将融合的临界状态。

Typical spatial distribution of the discharge plasma fluorescence and temporal evolutions of the discharge current and voltage in SF6/C2H6 mixture have been measured, which serves as the working gas of the discharge-pumped pulsed HF laser. Discharge stability, residual voltage and energy deposition efficiency were systematically analyzed by changing the initial conditions. It is shown that the process of discharge in the gas mixture has three phases: main discharge, voltage plateau and arc discharge, each of which has different discharge characters. Deposited energy in the gas mixture increases with the increase of charge voltage, but the duration of voltage plateau would be shortened. The raise in C2H6 concentration will postpone the arc discharge. The increase in total pressure of the gas mixture increases the residual voltage and decreases the energy deposition efficiency of glow discharge. The optimal energy deposition efficiency can be obtained at the critical state that the voltage plateau just disappears.