应用激光, 2010, 30 (4): 300, 网络出版: 2010-12-07
基于神经网络的157 nm激光微加工
157 nm Laser Micromachining Based on Artificial Neural Network
157nm激光 微加工 刻蚀质量 神经网络 工艺优化 157 nm laser micromachining etching quality Artificial Neural Network process optimization
摘要
157nm激光被视为光刻和微加工的有力工具之一，其加工的表面质量强烈依赖于激光参数。针对157nm微加工的特点，提出建立人工神经网络优化工艺参数的方法。分析与实验结果表明，利用优化的工艺参数进行激光微加工，其刻蚀质量得到明显提高。
Abstract
157 nm laser is considered as one of robust tools for microlithography or micromachining and the surface quality which is ablated by 157nm laser strongly depends on laser parameters. Establishing the model of Artificial Neural Network aim to op- timize process parameters is proposed based on the features of laser micro-machining process. The analysis and experiment show that the ablation quality of laser micro-machining was improved by utilizing the optimized process parameters.
崔健磊, 戴玉堂, 徐刚, 白帆. 基于神经网络的157 nm激光微加工[J]. 应用激光, 2010, 30(4): 300. Cui Jianlei, Dai Yutang, Xu Gang, Bai Fan. 157 nm Laser Micromachining Based on Artificial Neural Network[J]. APPLIED LASER, 2010, 30(4): 300.
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