研究了用于纳米测量的激光干涉仪中光学波片对非线性误差的影响，基于琼斯矩阵理论建立了多波片的误差分析模型，分析了λ/2和λ/4波片引起的干涉仪非线性误差，对波片位置引起的非线性误差进行了实验研究。结果表明，波片位置调整精度对干涉仪测量影响巨大，在0~5°范围内，λ/2波片和λ/4波片引起的非线性误差分别为6.5 nm和9.5 nm。上述研究结果为单频偏振激光干涉仪光路调整及非线性误差的补偿提供了参考。

The effect of wave plate on nonlinearity of single-frequency polarized laser interferometer in nano measurement is researched. An error analysis model of multi-wave-plate is established based on Jones matrices theory. The nonlinear error in interferometer induced by λ/2 and λ/4 wave plates is analyzed and nonlinear error caused by the position of wave plate is experimentally studied. The results indicate that the adjustment accuracy of wave plate position has a great influence on measurement. In the range from 0 to 5°, the non-linearities caused by λ/2 and λ/4 wave plates are 6.5 nm and 9.5 nm respectively. The research results provide a beneficial reference for optical path adjusting and nonlinear errors compensation of orthogonal polarized laser interferometer.