基于1维流体力学模型, 对大气压射频裸露金属电极氩气放电过程进行了研究。模型中考虑了氩等离子体放电过程中主要发生的激发和电离等7个反应过程, 对等离子体反应产生的主要粒子, 包括电子、氩原子离子Ar+、氩分子离子Ar+2和氩激发态Ar*等, 建立连续性方程、动量方程和电流平衡方程。分析了极板电压、极板间距对上述粒子数密度分布的影响。给出了电子,Ar+,Ar*和Ar+2密度随极板电压及间距变化的时空演化过程。得出极板电压或极板间距的改变会使放电空间的电场发生改变, 对应一定的极板间距, 极板电压有一个最佳值, 极板电压和间距的变化会使对应的极板间有一个最佳电场值, 而对应最佳电场有一个等离子体气体间最佳反应系数, 从而使放电空间粒子数密度发生改变。

On the basis of one-dimensional fluid model, the characteristics of radio frequency discharge at atmospheric pressure in argon using bare metal electrode are numerically investigated. The primary processes of excitation and ionization in Ar are considered. The particles included in the model are electron, two ions Ar+ and Ar+2 and one metastable state Ar*. The spatial-temporal evolutions of the discharge density with electrode voltage and gap are calculated by solving the one-dimensional continuity and momentum equations for electrons and ions, coupled with the current continuity equation. The simulation results show that the densities of electron, Ar+, Ar+2, and Ar* have an optimal value with the variation of electrode voltage and gap.