光学与光电技术, 2010, 8 (5): 13, 网络出版: 2011-01-05
激光微加工制作的微光纤珐-珀加速度传感器
A Miniature Fiber-Optic Fabry-Perot Accelerometer Fabricated by Laser Micro-Machining
光纤光学 传感器 激光微加工 光纤珐-珀腔 加速度计 MUSIC算法 fiber optics sensor laser micro-machining Fabry-Perot cavity acceleration meter MUSIC algorithm
摘要
将157 nm激光微加工制作的微光纤珐-珀腔贴于悬臂梁结构构成加速度传感器。通过设计特定的悬臂梁结构和FFT方法,该加速度传感器的分辨率约为1.13 mg/Hz1/2。通过采用MUSIC算法处理信号,信噪比可提高45 dB,系统分辨率约为3.56×10-2 μg/Hz1/2。该微光纤珐-珀传感器具有可批量制作、成本低、抗高温、量程灵活等优点,有望应用于石油勘探、地震测量等领域中。
Abstract
A miniature Fabry-Perot cavity fabricated by 157 nm laser micro-processing mounted on a cantilever beam structure is used as an accelerometer. By using specific cantilever structure and FFT method, the resolution ratio of the F-P sensor accelerometer is about 1.13 mg/Hz1/2. By adopting MUSIC algorithm, the signal to noise ratio of such a sensor system is increased 45 dB and the resolution ratio achieved is about 3.56×10-2 μg/Hz1/2. The sensor can be mass produced with low cost, high-temperature-resistant, flexible range, and is anticipated to be used in the field of oil exploration, seismic surveying, etc.
俞晓婧, 冉曾令, 饶云江. 激光微加工制作的微光纤珐-珀加速度传感器[J]. 光学与光电技术, 2010, 8(5): 13. YU Xiao-jing, RAN Zeng-ling, RAO Yiun-jiang. A Miniature Fiber-Optic Fabry-Perot Accelerometer Fabricated by Laser Micro-Machining[J]. OPTICS & OPTOELECTRONIC TECHNOLOGY, 2010, 8(5): 13.