采用电子束热蒸发技术在K9玻璃基底上以不同的沉积入射角沉积了单层TiO2薄膜，研究了不同入射沉积角沉积的TiO2薄膜的光学特性、填充密度和表面粗糙度，并比较了不同膜层厚度下薄膜表面粗糙度与入射沉积角之间的关系。研究结果表明，随着入射沉积角的增加，TiO2薄膜的透射率增加，透射峰值向短波移动，薄膜的填充密度从入射沉积角0°时的0.801 降低到入射沉积角为75°时的0.341；薄膜的表面粗糙度随着入射沉积角的增加而增加，当入射沉积角为75°时，薄膜的表面粗糙度略高于基底的表面粗糙度。在沉积入射角不变时，随着膜层厚度的增加，膜层的表面粗糙度降低。

Optical properties, surface roughness and packing density of TiO2 thin films obliquely deposited on K9 glass by electron beam evaporation are investigated. The surface roughness of TiO2 thin films with different incident deposition angles are compared. The experimental results show that the transmittance increases and transmittance peak shifts to short wavelength with increasing incident deposition angle, and that the packing density of TiO2 thin films decrease from 0.801 to 0.341 with incident deposition angle increasing from 0° to 75°. The surface roughness of TiO2 thin films increases with increasing incident deposition angle, and at 75°, it is slightly higher than the surface roughness of K9 substrate. When the incident deposition angle is constant, TiO2 thin films surface roughness decreases with the increase of film thickness.