HCl是非常重要的化工原料, 而且具有很强的腐蚀性和毒性, 对其实现在线监测不但对工业生产工艺的优化会起到重要作用, 也能有效的为环境污染提供必要的参照和数据。 可调谐半导体激光吸收光谱技术(tunable diode laser absorption spectroscopy, TDLAS)具有高灵敏、 高选择性、 快速响应等特点, 该技术利用了半导体激光器的可调谐和窄线宽特性, 通过选择待测气体的某条吸收线可排除其他气体的干扰可实现待测气体浓度的快速在线检测。 介绍基于TDLAS的HCl气体检测的系统及实验, 重点研究了温度对HCl测量的影响及其温度补偿方法, 得出了一个经验公式。 最后的实验结果验证了经验公式的合理性, 进一步提高了TDLAS传感器在工业高温环境下测量气体浓度的准确性和可行性。

HCL, with the character of strong erosion and toxicity, is a kind of chemical material of vital importance. So measuring the HCL in-situ can not only optimize its production process, but also be necessary to reduce the environment pollution. TDLAS(tunable diode laser absorption spectroscopy)technology, and owning the advantage of the tunability and narrow line width of the diode laser, this method can relatively easily select the absorption line of the detected gas without the interference from other gas, thus making the rapid and accurate HCL measurement possible. In the present paper, the HCL measurement system and the implemented experiment are introduced. The impact of the temperature on the measurement as well as the temperature compensation method is emphasized. The final experimental results validated the rationality of the empirical equation and therefore the improvement of the accuracy and feasibility of the TDLAS technology .The system, whose detection limitation reaches 2 ppm, can satisfy the needs of industrial in-sit measurement.