光电技术应用, 2010, 25 (6): 22, 网络出版: 2011-02-21
平面反射镜光学薄膜的制备
Preparation of Plane Reffection Mirror Optical Thin Films
摘要
以薄膜原理为基础，通过Essential Macleod软件进行膜系设计.采用电子束加热蒸发的镀膜方式，利用设计工装制备了介质ZrO 2 -SiO 2 高反射膜层和金属铝反射膜层.介质高反膜层在1.064μm波长处的反射率达到95%，金属铝反射膜层的在3μm～5μm波段内的平均反射率超过95%.膜层的技术指标和环境适应性能具有优质的质量.
Abstract
Coatings were designed by Essential Macleod software based on the theory of film.High reflective ZrO 2 -SiO 2 dielectric coating and reflective aluminum coating were made using the design clothes by electron beam heating evap-oration coating method.The reflectivity of dielectric coating is up to rate of95%in wavelength of1.064μm，and the av-erage reflectivity of aluminum coating is over 95% between 3 μm and 5 μm. The technical parameters and environmental adaptability of the film are excellent.
王保松, 刘军成, 陈静. 平面反射镜光学薄膜的制备[J]. 光电技术应用, 2010, 25(6): 22. WANG Bao-song, LIU Jun-cheng, CHEN Jing. Preparation of Plane Reffection Mirror Optical Thin Films[J]. Electro-Optic Technology Application, 2010, 25(6): 22.
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