谐振腔是MOEMS陀螺的关键器件, 由于谐振腔具有相对失调特性, 所以传统的调腔是以人工方式进行的。研究并提出了一种新型的可应用于微光机电(MOEMS)陀螺谐振腔的闭环调整方案, 完成了基于机器视觉和PZT控制的闭环调整系统及调腔实验, 得到了预期的效果, 并进行了相关的分析。

As the key element of MOEMS Gyroscope, the resonator has relative maladjustment character. It was adjusted manually in the past. A new scheme of closed-loop adjustment is put forward which can be applied in MOEMS gyroscope resonator. The closed-loop adjustment system and adjustment experiment are completed. The adjustment system is based on machine vision and PZT control. The result accords with the expectation.