光学技术, 2010, 36 (2): 200, 网络出版: 2011-02-21
基于Lissajous图技术的波长移相标定方法
Wavelength-tuned phase-shifting calibration based on the Lissajous figures technique
光学测量 波长移相 Lissajous图 移相量计算 optical testing wavelength phase-shifting Lissajous figure phase-shifting value calculation
摘要
波长移相干涉仪可应用于大口径光学元件的检测。研究了基于Lissajous图技术的波长移相标定方法, 实现了干涉图间移相量的计算, 解决了在不同干涉腔长下进行测试时移相量需控制成为一个特定值的问题。首先通过模拟仿真, 验证了方法的正确性;然后编写程序对已知移相量的实际干涉图进行计算。结果表明, 在干涉图对比度较好以及对计算的两点选择恰当的情况下, 计算出的相对误差在4%范围内。
Abstract
Wavelength-tuned interferometers are applied to test the large optical components. The phase-shifting calibration method based on the Lissajous figures technique is studied. Through the method, the phase-shifting steps between the interferograms are obtained. How to control the phase-shifting step to a certain value at different interferometric cavity lengths when testing is solved. The simulation program is written and it shows the method correct. The program is written to calculate the interferograms which the phase-shifting step is known. The result shows that the relative error is in the range of 4% when the contrast of the interferograms is good and the calculated points are selected correctly.
郭仁慧, 李建欣, 朱日宏, 陈磊. 基于Lissajous图技术的波长移相标定方法[J]. 光学技术, 2010, 36(2): 200. GUO Ren-hui, LI Jian-xin, ZHU Ri-hong, CHEN Lei. Wavelength-tuned phase-shifting calibration based on the Lissajous figures technique[J]. Optical Technique, 2010, 36(2): 200.