由于激光显微干涉只能测量表面微观形貌的相对高度值，不能进行绝对测量，本文提出了白光显微干涉测量方法，研制了测量仪器，并对CCD 像素格值和PZT 进行了标定。该仪器以白光干涉理论为基础，利用空间频域算法计算白光干涉图零级条纹中心位置，根据零级条纹中心移动量来得到被测工件表面微观形貌。对被测工件表面进行了测试，试验结果表明：此系统可用于平面、台阶、薄膜、球面等三维微观形貌的测量。

As the laser interference microscope testing technology is only suitable for the measurement of relative altitude in surface topography testing and is not available for absolute measurement, the method by using white light interference microscope testing technology is presented. The measuring instrument based on the white light interference theory is developed, and the calibration between the pixel of CCD and PZT is carried out. The topography of the testing surface is calculated with the micro-displacement of the center of zero class white light fringe, which is located through spatial frequency-domain algorithm. The experiment is carried out, and the result shows that the method is available for measuring the topography of plane surface, bench surface, film surface and sphere surface.