激光与光电子学进展, 2011, 48 (3): 032203, 网络出版: 2011-02-28
折衍光学镜片的单点金刚石车削与检测
Single-Point Diamond Turning and Testing of Hybrid Diffractive-Refractive Optical Lens
光学器件 二元光学 折衍混合镜片 单点金刚石车削 检测 optical devices binary optics hybrid diffractive-refractive lens single-point diamond turning testing
摘要
讨论了折衍光学镜片的设计、加工和检测。结合设计采用单点金刚石车削工艺加工出了具有连续浮雕结构的折衍光学镜片。对加工成的折衍光学镜片采用先进的数字化检测，结果表明，面型精度为0.228 μm，表面粗糙度为1.279 nm，台阶位置误差小于1/3波长。对折衍光学镜片加工中产生的遮挡效应和光的透过率损失给出了定量的分析结果。
Abstract
The optical design, fabrication and testing of hybrid diffractive-refractive optical lens are discussed. A hybrid lens with continuous structure is fabricated using single-point diamond turning according to the design. Advanced digital testing methods are utilized for testing the hybrid lens. The testing result shows that, the profile accuracy is 0.228 μm, the surface roughness is 1.279 nm, and position error of step is less than one third of the wavelength. Quantitative analysis of transmission blockage and transmission loss of light of hybrid diffractive-refractive lens is given.
梁旭, 王军华, 徐敏, 李锦江, 李旭峰. 折衍光学镜片的单点金刚石车削与检测[J]. 激光与光电子学进展, 2011, 48(3): 032203. Liang Xu, Wang Junhua, Xu Min, Li Jinjiang, Li Xufeng. Single-Point Diamond Turning and Testing of Hybrid Diffractive-Refractive Optical Lens[J]. Laser & Optoelectronics Progress, 2011, 48(3): 032203.
PDF全文
