针对大功率LD的冷却需求，基于沸腾-空化耦合效应，研制了一种微通道相变热沉，封装腔长1.5 mm的LD线阵。依据加工条件确定通道宽度、深度以及间距，采用2维数值模型估算了通道长度，热沉材料采用无氧铜，多层叠焊，外形尺寸为20 mm×12 mm×1.6 mm。实验测试了连续功率LD输出0～100 W时的电-光转换效率以及电流-输出功率等特性，冷却工质采用R134a，磁驱齿轮泵电机转速50 r/s时热沉热阻为0.3 ℃/W。结果显示微通道相变热沉具有良好的散热能力，能够满足大功率LD的散热要求。

A copper micro-channel phase-change heat sink has been developed for cooling high power continual laser diode based on coupling of boiling-cavitation in micro-channel. Its exterior size was 20 mm×12 mm×1.6 mm. The length of channel was estimated through 2D numerical calculation, and the width, depth and separation were determined according to processing conditions. The electron-optic efficiency, output wavelength and the relation between input current and output power were measured experimentally when LD output power changes from 0 to 100 W. The cooling refrigerant was R134a. The thermal resistance of heat sink was measured as 0.3 ℃/W, when the magnetic drive gear pump operated at 50 r/s motor speed.