对多层介质反射膜与单层化学增透膜的损伤形貌、损伤过程及膜层的吸收特性进行了实验研究。结果表明：缺陷除了可以从其形态和光学特征分类外，还可以按缺陷的功能来划分，即以缺陷的损伤阈值来区分不同缺陷的抗激光损伤能力。通过对缺陷吸收率的测量，表明膜层的损伤阈值与缺陷的分布密度和热吸收具有显著的一致性。通过对损伤阈值分布曲线研究，可以有效地对缺陷进行分级判断，从而分析光学元件表面功能性缺陷的分布状况。

In order to understand the effect of defect distribution on damage behaviors of optical films, the damage morpho-logies, damage processes and absorptive features are experimentally investigated for the multi-layer dielectric reflective films and single-layer sol-gel anti-reflective films. The results show that defects can be classified from functional property besides from morphological and optical properties. In other words, the laser resistance capability of different defects can be distinguished with their damage thresholds. The damage thresholds of optical films are very consistent with the density distributions and thermal absorptivities of defects. According to the damage threshold evolutions, the defects can be effectively classified and judged, and the distribution properties of functional defects in the optics surfaces can be analyzed.