光开关和可变光衰减器(VOA)是光通信系统中的关键器件, 而微电子机械系统(MEMS)技术是一种具有发展前景的光开关技术。文章提出一种兼具VOA功能的1×2 MEMS光开关, 详细介绍了其原理, 并且利用矩阵光学推导了插入损耗的计算公式。在设计了透镜的各项参数的基础上制作出了光开关样品, 并且将样品的测试结果与计算的结果进行对比分析, 指出这种光开关是具有实用价值的。

Optical Switches (OSW) and Variable Optical Attenuators (VOA) are key components in fiber-optic communication systems and Micro-Electro-Mechanical Systems (MEMS) is a promising OSW technology. In this paper, a 1×2 MEMS OSW with VOA functions is presented, its theory introduced in detail and the formula for the calculation of the insertion loss is deduced in detail by using matrix optics. On the basis of designing the parameters of the C-lens, an OSW sample is made and compared with the calculations, the result of which indicates that this OSW has practical values.