文章研究了暴露空气对臭氧处理ITO表面效果的影响。结果表明，臭氧处理ITO表面显著提高了器件的空穴注入能力，暴露空气减弱了臭氧处理对空穴注入的提高效果。研究显示，暴露空气对臭氧处理效果的影响在于：不仅减小ITO表面功函数，导致空穴注入势垒重新增大，也将降低ITO表面能，减弱空穴注入层的粘附力，增加阳极界面接触电阻。

Here the influence of atmosphere exposure after RF Ozone treatment on ITO surface has been studied. The results indicated that: Ozone treatment on ITO surface improved hole injection sharply, but the atmosphere exposure after treatment decreased this improvement. We proposed that the atmosphere exposure not only decreased the work function of treated ITO surface that increased hole injection barrier again, but also decreased ITO surface energy that reduced the strength of adhesion and increased the contact resistant at anode interface.