气囊柔性抛光是一种新型的精密光学元件的抛光技术，在非球面制造领域有着广泛的应用。采用柔性气囊抛光装置，选择了三种不同的抛光模层材料进行实验，分析了抛光材料对样片表面粗糙度与表面缺陷的影响。实验研究表明，呢绒是一种高效的非球面元件柔性抛光的模层材料，丝绒材料适用于高质量超光滑元件的抛光。

Ballonet polishing is a new type of flexible polishing technology in the optical polishing. The polishing experiment is implemented on the flexible ballonet polishing device. Three kinds of different polishing layer materials are used in the experiment. Surface roughness and surface defect of the samples of these layer materials are analyzed. The experimental results show that the woolen cloth is a good layer material which can get high processing efficiency, while the velvet material gets low surface defect on polishing sample.