激光与光电子学进展, 2011, 48 (4): 042204, 网络出版: 2011-03-24
基于轮廓仪测量数据的非球面方程反演技术
Inversion Method for Aspheric Surface Equation Derivation Based on Data Measured from Talysurf
摘要
求取未知参数或有面形误差的实际非球面光学零件面型方程,在非球面加工精度分析、光学系统成像质量分析、拆解分析光学镜头等方面都有实际需求。分析了Taylor Hobson轮廓仪测量数据格式,采用遗传算法,根据测量数据反演非球面的方程,对反演过程中采取的关键技术进行了分析。编制软件实现了非球面方程的反演,验证了所提方法的可行性。
Abstract
Derivation of unknown parameters or deviation of practical aspheric optic surface equation with surface error are in practical demand for aspheric machining accuracy analysis, optical system imaging quality analysis, and decomposition analysis of optical lenses. Beginning with an analysis of the data format obtained from Taylor Hobson Talysurf, the key technique used for inversion method to derive aspheric equation based on genetic algorithm and measured data is analyzed. Programmable inversion of aspheric equation is given. It is shown that the method proposed is practical.
耿安兵, 王彬. 基于轮廓仪测量数据的非球面方程反演技术[J]. 激光与光电子学进展, 2011, 48(4): 042204. Geng Anbing, Wang Bin. Inversion Method for Aspheric Surface Equation Derivation Based on Data Measured from Talysurf[J]. Laser & Optoelectronics Progress, 2011, 48(4): 042204.