光学 精密工程, 2011, 19 (2): 213, 网络出版: 2011-03-30  

用于激光器的电感储能发生器

Generator with inductive energy storage for laser application
作者单位
Institute of High Current Electronics SB RAS, Akademichesky ave., 2/3, Tomsk 634055, Russia
摘要
研制了适用于激光器的电感储能发生器(GIES),并研究了它在高压混合气体中的放电和激光参数。研究表明,电感储能发生器可产生高压预脉冲并引起放电电流的突然增大,可在不同的混合气体中形成长时间的稳定放电,从而方便地控制和优化每一种气体混合物的预脉冲参数。在未知IES击穿电压和首次放电幅度下的参数时,电流尖峰会按因子1.5~2减少,从而产生纯激光参数。得到了氮气激光器的最大的辐射功率,输出能量和脉冲持续时间,在脉冲持续时间为40 ns时,紫外输出高达50 mJ,红外输出高于25 mJ,实现了氮分子激光跃迁的级联激射。因此C3Пu-B3Пg带总的脉冲持续时间延长至100 ns。在XeCl,XeF和KrF受激准分子激光器中,脉冲宽度和输出能量都得到了改善。XeF激光器的最大效率达到了1.6%,同时峰值输出能量达到了0.85 J,最大脉冲持续时间超过了200 ns。在248 nm波长处,效率3.3%的KrF激光器产生的160 ns脉冲能量高达650 mJ,最终得到了效率为7.7%~10%的非链式HF(DF)激光器。演示了基于CO2分子高峰值功率的有效运行,结果表明,激光器在10 600 nm处的输出能量为6.2 J,转换效率高达25%。
Abstract
Generators with Inductive Energy Storage (GIES) are developed for laser applications. Discharge and laser parameters in high-pressure gas mixtures are studied. It is shown that the IES generator produces a high-voltage pre-pulse and the sharp increase of discharge current, which allows to form a long-lived stable discharge in different gas mixtures. Therewith the pre-pulse parameters can be easily controlled and optimized for each gas mixture. Without the IES breakdown voltage and amplitude of the first discharge,the current spike decreases by a factor of 1.5-2 and results in pure laser parameters.The maximal radiation power, output energy and the laser pulse duration of a N2 laser are obtained. The UV output is as high as 50 mJ in 40 ns pulse duration (FWHM), while that on the IR transition exceeds 25 mJ. The cascade lasing on N2 molecule transitions is achieved. As a result,the total pulse duration on the C3Пu-B3Пg band is extended up to 100 ns. The improvement of both pulse duration and output energy are achieved for XeCl, XeF and KrF excimer lasers. The maximal efficiency of XeF laser is as high as 1.6%, while peak output is 0.85 J and maximal pulse duration exceeds 200 ns. Up to 650 mJ in a 160 ns pulse is obtained at 248 nm by the discharge KrF laser with the efficiency of 3.3%.Finally, HF(DF) non-chain lasers with ultimate efficiency of 7.7-10% are developed,and the efficient operation on CO2 molecules with high peak power is demonstrated. The laser output at 10 600 nm is 6.2 J with the efficiency up to 25%.

TARASENKO V F, PANCHENKO A N, TEL’MINOV A E, GENIN D E. 用于激光器的电感储能发生器[J]. 光学 精密工程, 2011, 19(2): 213. TARASENKO V F, PANCHENKO A N, TEL’MINOV A E, GENIN D E. Generator with inductive energy storage for laser application[J]. Optics and Precision Engineering, 2011, 19(2): 213.

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