光学 精密工程, 2011, 19 (3): 520, 网络出版: 2011-03-30
用非零位补偿法检测大口径非球面反射镜
Measurement of large aspheric mirrors by non-null testing
光学检测 圆形子孔径拼接干涉 环形子孔径拼接干涉 大口径非球面 最小二乘拟合 optical testing Circular Subaperture Stitching Interferomerty(CSSI Annular Subaperture Stitching Interferometry(ASSI) large aspheric surface least-squares fitting
摘要
研究了利用圆形子孔径拼接和环形子孔径拼接检测非球面的方法,以实现非零位补偿法对大口径非球面的测量。分析和研究了该技术的基本原理,并基于齐次坐标变换和最小二乘拟合建立了综合优化和误差均化的拼接数学模型;分别开发了圆形子孔径拼接和环形子孔径拼接检测非球面的算法软件;设计和搭建了子孔径拼接干涉检测装置,并分别利用圆形子孔径拼接和环形子孔径拼接实现了对一口径为350 mm的双曲面的检测。对待测非球面进行了零位补偿检测实验,结果显示,圆形子孔径拼接与全口径补偿测量结果的PV值和RMS值的偏差分别为0.031λ和0.004λ;环形子孔径拼接与全口径补偿测量结果的PV值和RMS值的偏差分别为0.028λ和0.006λ;3种方法测量所得的面形分布都是一致的。所提出的方法提供了除零位补偿检测外的另一种定量测试大口径非球面的手段。
Abstract
Circular Subaperture Stitching Interferometry (CSSI) and Annular Subaperture Stitching Interferometry(ASSI) were expounded to realize the test of large aspheric surfaces without the null optics. The theories and principle of the technique were analysised,and the synthetical optimization stitching model and an effective stitching algorithm were established based on homogeneous coordinate transformation and simultaneous least-squares fitting. The softwares of CSSI and ASSI were devised, respectively, then the experiment was carried out for a Φ350 mm hyperboloid by CSSI, ASSI and a null test, respectively.Experiments show that the differences of PV and RMS errors between null test and CSSI are 0.031λ and 0.004λ, and those between null test and ASSI are 0.028λ and 0.006λ, respectively,while their synthesized surface maps are consistent to the entire surface map from the null test. The technique proposed in this paper provides another quantitive measurement for testing large aperture aspheres besides the null-compensation method.
王孝坤, 王丽辉, 邓伟杰, 郑立功. 用非零位补偿法检测大口径非球面反射镜[J]. 光学 精密工程, 2011, 19(3): 520. WANG Xiao-kun, WANG Li-hui, DENG Wei-jie, ZHENG Li-gong. Measurement of large aspheric mirrors by non-null testing[J]. Optics and Precision Engineering, 2011, 19(3): 520.