扫描透射X射线显微术(STXM)是近年发展起来的基于第三代同步辐射光源的新型谱学显微技术。上海光源已在覆盖大多数重要元素吸收边的250~2000 eV光子能量段实现了STXM技术。基于上海光源STXM实验站装置模拟了一种新的成像方法：在充分利用原有装置基础上发展扫描相干衍射成像技术，不但可以有效提升实验站的空间分辨能力，而且实现起来也相对简单。针对上海光源软X射线实验站特点，讨论了实现扫描相干衍射成像的相干性条件，实验站各因素对成像分辨率的影响等，并针对具体的实验条件进行了模拟分析。模拟显示，通过发展该项技术可有效提高特定样品的空间分辨能力。

Scanning transmission X-ray microscopy (STXM) is a recently developed spectroscopic microscopy based on the third generation synchrotron radiation facilities. Shanghai Synchrotron Radiation Facility (SSRF) has achieved STXM method, and the energy spans from 250 to 2000eV which covers most of the important elements′ absorption edge. A new experimental method: by fully using the STXM equipment to develop scanning X-ray diffractive technology, not only can improve the spatial resolution, but also can be easy to implement. Considering the specialty of SSRF, the condition of coherence of SSRF for scanning X-ray diffractive technology and experimental condition for the image resolution of reconstruction are discussed. Finally, the method using specific parameters is simulated. Simulation shows that using this technology can efficiently improve the spatial resolution based on specific experimental conditions of specific specimen.