针对军用光电仪器对激光致盲**的防护要求，选取Si和YbF3，ZnS和YbF3两种高低折射率组合形式研制了激光防护减反膜。在多光谱ZnS基底上，采用电子束及离子辅助沉积技术，制备了能够对532 nm和1064 nm激光进行有效防护，同时对3～5 μm的波段具有高透射率的薄膜。对Si膜的电子束沉积工艺进行了研究；对YbF3在不同的材料组合中的沉积工艺进行了优化；解决了膜层与基底之间的粘附性问题。该薄膜集探测用减反器件和防护器件于一体，可以使星载、机载等光电仪器的结构得到简化；光谱分析和环境测试的结果表明，各项指标满足使用要求。

In order to protect the military opto-electronic instruments from laser blinding weapons, the high and low refractive index combinations of Si and YbF3, ZnS and YbF3 are selected to design and fabricate laser protective infrared antireflection coatings. On the substrate of multi-spectral ZnS, coatings with laser protective function to 532 nm and 1064 nm laser while with high transmittance in the 3~5 μm spectral band are fabricated, and electron beam and ion assisted deposition technique is used in this process. The deposition process of Si by electron beam is studied, and the deposition process of YbF3 in different materials combination is optimized. The adhesion problem between coatings and substrate is resolved. Devices of antireflection for detection and protection are both integrated into the coatings, and the structures of opto-electronic instruments for satellite and aeroplane can be simplified. Results of spectrum analysis and environmental test show that all the parameters meet the requirements.