凸面闪耀光栅是研制高光谱分辨率超光谱成像系统的关键器件之一。由于要求的闪耀角度一般较小，制作工艺难度大，其衍射效率与理论值有较大差距，一直制约其应用。针对上述问题与难点进行了分析，通过光刻胶光栅掩模制作和Ar+离子束刻蚀等工艺制作了凸面闪耀光栅。针对离子束大掠入射刻蚀凸球面时槽形闪耀角不易一致的难题，利用转动扫描刻蚀实现了球面上的闪耀光栅刻蚀，最终制作出了约4.3°闪耀角的凸面闪耀光栅，在400~800 nm波段范围内，其+1级衍射光效率均值达40%以上。

Convex blazed grating is one of the most important devices in hyperspectral imaging spectrometers. The major application obstacle is the huge gap between the diffraction efficiency which is obtained from the experiment and that in theory. The bottleneck lies in the small blazing angles required in the manufactory. To solve this problem, a convex blazed grating is made by adopting an argon ionbeam to directly etch the substrate through a photoresist mask. Considering the potential inconsistent blazing angles across the whole convex grating area with big glancing angle, the blazed grating etching of spherical surface is realized by using a circular scanning etching. A grating of a small blazing angle of 4.3° is fabricated. The average efficiency of the first order diffracted beams is more than 40% in the visible wavelength range.