激光与光电子学进展, 2011, 48 (6): 062301, 网络出版: 2011-05-09
基于微型光机电系统扫描镜技术的激光散斑抑制方法
Speckle Reduction Based on MOEMS-Scanning Mirror Techonology
激光 显示技术 散斑抑制 微型光机电系统扫描镜 消相干 lasers display technology speckle reduction micro-opto-electro-mechanical system scanning mirr decoherence
摘要
激光固有的时间和空间相干性,造成的散斑现象成为实现激光显示技术的瓶颈。针对激光显示的消散斑问题,提出了一种基于微型光机电系统(MOEMS)扫描镜技术的散斑抑制方法,并设计了一种简单的二维扫描镜结构,为开发非运动式、小体积、低功耗、高速低成本电调制的MOEMS,实现对激光散斑的抑制,标准化消相干器件的工艺的开发和规模化生产技术提供了参考。
Abstract
The temporal coherence and spatial coherence of laser are the bottleneck of the laser display technology. To solve the speckle suppression problem, a speckle suppression method based on micro-opto-electro-mechanical system (MOEMS) scanning mirror technology is proposed. Meanwhile a simple structure of the two-dimensional micro-mirror, which will provide some references for the research of static, small size, low power consumption, high speed and low cost laser speckle suppression methods is proposed.
唐国先, 石云波, 刘俊, 赵幸娟, 柴鹏兰, 王瑞荣. 基于微型光机电系统扫描镜技术的激光散斑抑制方法[J]. 激光与光电子学进展, 2011, 48(6): 062301. Tang Guoxian, Shi Yunbo, Liu Jun, Zhao Xingjuan, Chai Penglan, Wang Ruirong. Speckle Reduction Based on MOEMS-Scanning Mirror Techonology[J]. Laser & Optoelectronics Progress, 2011, 48(6): 062301.