相位掩模空间载波干涉图的处理精度直接影响着动态干涉仪的性能。根据相位掩模的特点，提出了一种基于傅里叶分析的相位掩模空间载波干涉图的处理方法。该方法将采集得到的全分辨率干涉图进行像素空间重组得到一幅线性空间载波干涉图，然后采用傅里叶变换提取相位，最后再通过像素空间重组得到全分辨率的相位信息。实验结果表明，四步相移算法相位误差的峰谷值和均方根值分别为0.7467λ和0.0348λ，而傅里叶分析法相位误差的峰谷值和均方根值分别为0.2989λ和0.0088λ，因此傅里叶分析法的精度高于四步相移算法。

The process accuracy of phase-masked spatial carrier interferogram is related to the performance of the dynamic interferometer. According to the property of the phase mask, a method based on Fourier transform is proposed to extract the phase from the phase-masked spatial carrier interferogram. The method translates the full-resolution interferogram into a linear spatial carrier interferogram by pixel rearrangement, and then extracts the final full-resolution phase distribution by Fourier transform and pixel rearrangement again. Experimental results show that the peak-valley value and the root mean square of four-step phase shifting algorithm are 0.7467λ and 0.0348λ respectively, while those of the proposed method are 0.2989λ and 0.0088λ. Thus the proposed method is more accurate than four-step phase shifting algorithm for analyzing phase-masked spatial carrier interferogram.