设计了具有推挽调制电极和消逝场敏感窗口的铌酸锂（LiNbO3）基集成光波导马赫曾德尔干涉仪（MZI）。利用标准微光机电系统（MOEMS）加工工艺结合高温钛内扩散法制备出三维单模LiNbO3光波导MZI阵列芯片，并对芯片进行了端面抛光，实现了光纤波导端面输入和输出耦合，并初步调查了干涉仪芯片的相位调制特性，结果表明，在633 nm波长下其半波调制电压为5.61 V，干涉条纹对比度为0.62。当干涉仪芯片被用于生化探测时，这种电光调制功能可用于调节干涉仪芯片的初始相位差和识别其相位差的变化方向。

LiNbO3-based integrated optical waveguide Mach-Zehnder interferometer (MZI) with push-pull electrodes and evanescent field sensing window is developed. By using standard micro-opto-electro-mechanical-system (MOEMS) technique and titanium-indiffusion method, LiNbO3 monomode channel waveguide MZI array with modulating electrodes is fabricated. The near-field profile of the guided mode is detected after launching light into the LiNbO3 waveguide by fiber end-fire coupling. The phase-modulating property of the LiNbO3 MZI is investigated. The experimental results show that the phase modulation of the MZI is fully reversible and its half-wave voltage Vπ is 5.61 V, and fringe contrast is 0.62. The phase-modulating capability allows the initial phase of the MZI device to be a quadrature point to make the device work in the linear-response region for biochemical sensor.