光子学报, 2011, 40 (4): 561, 网络出版: 2011-05-10   

基于KH560修饰的有机/无机杂化材料电光波导制备

Preparation of Electro-Optic Waveguide Based on KH560 Modified Organic/Inorganic Hybrid Materials
作者单位
1 吉林大学 a.电子科学与工程学院 集成光电子学国家重点联合实验室吉林大学实验区
2 吉林大学 b.化学学院, 长春 130012
摘要
利用溶胶-凝胶法制备了硅烷偶联剂KH560修饰的有机/无机杂化电光材料,分析了KH560的水解缩合的反应机理.对制备好的电光薄膜进行了表面形貌、折射率和电光特性的表征,并用反射法测量得出了该材料的电光系数为3.5pm/V.针对这种材料柔韧的特性,设计了上加载条形电光波导,并利用Opti-BPM软件模拟了二维和三维光场.摸索了其制备的加工工艺,制备了该结构的光波导,最后得到了这种波导的近场输出.
Abstract
A kind of silane coupling agent KH560-based organic / inorganic hybrid electro-optic (E-O) material was synthesized by Sol-Gel method. The reaction mechanism of hydrolysis and condensation of KH560 in the case of hydrochloric acid as a catalyst was analysed. Then the surface morphology, refractive index and E-O properties of the thin films were characterized by means of atomic force microscopy (AFM), ellipsometry, and simple reflection method. At last, the poled polymer films with good shape and alterable refractive index were obtained. The E-O coefficient was measured to be 3.5 pm/V @1 310 nm wavelengh based on the simple reflection method. According to the flexibility of this material, the structure of the strip-loaded waveguide was designed.And the two-dimensional and three-dimensional light fields were also simulated by the Opti-BPM software. After exploring the processing technology, the fabrication of the waveguide with strip-loaded structure was completed. Finally the near-field images of this waveguide were obtained.

王希斌, 曹子谏, 靳琳, 任殿福, 张大明. 基于KH560修饰的有机/无机杂化材料电光波导制备[J]. 光子学报, 2011, 40(4): 561. WANG Xi-bin, CAO Zi-jian, JIN Lin, REN Dian-fu, ZHANG Da-ming. Preparation of Electro-Optic Waveguide Based on KH560 Modified Organic/Inorganic Hybrid Materials[J]. ACTA PHOTONICA SINICA, 2011, 40(4): 561.

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