相对于普通的有机/无机杂化材料，侧链键合型有机/无机杂化材料能提高生色团的掺杂浓度，避免出现结晶、相分离等现象，同时生色团极化有序性的弛豫因生色团运动受阻而降低，具有较高的热稳定性.本文采用溶胶凝胶法合成了一种性能优良、稳定的侧链键合型有机/无机杂化材料，并将这种材料应用于电光调制器的电光层，利用传统的半导体工艺，采用加载条形波导结构，成功制备了马赫-曾德尔(Mach-Zehnder，M-Z)型电光调制器.测试得到电光调制器在1 550 nm波长下10 kHz的响应信号，为键合型杂化材料应用于光电器件的进一步研究打下了基础.

Compared with common organic-inorganic materials, side chain bonded organic-inorganic material has better thermo-stability, and can avoid crystallization and phase separation. And the relaxation of ordered polarized chromophore is restricted as the movement of chromophore is blocked. A kind of stable, good-performance side chain bonded organic-inorganic material was compounded and applied as the electro-optic layer.Conventional semiconductor processing was applied to fabricate strip-loaded waveguide structure and the Mach-Zehnder(M-Z) electro-optic modulators were made.Response signal of 10 kHz was observed at 1 550 nm light source.