光学与光电技术, 2011, 9 (1): 60, 网络出版: 2011-05-18
一种离轴计算全息图在凹非球面检测中的应用
Application of Off-Axis CGH to Aspheric Surface Test
文字间用 号隔开空半格非球面检测 计算全息图 凹非球面 离轴 相移 pheric surface testing computer-generated hologram concave aspheric surface off-axis phase shift
摘要
为了精确检测大口径非球面面型质量,将CGH作为补偿器应用于凹非球面的离轴全息检测系统中。根据计算全息图的离轴全息检测系统检测凹非球面的基本原理,分析了离轴CGH的计算、制作过程,实现了对口径为150 mm,近轴半径为1 499.7 mm,非球面系数为-1的凹非球面镜的检测。实验结果与轮廓仪检测结果吻合得很好。
Abstract
Compute-generated hologram is used as a compensator in off-axis holographic detection system to test large concave aspheric surface more precisely. According to the principle of the off-axis holographic detection system using CGH, the calculation and making of CGH are analyzed. The measurement of concave aspheric surface with an aperture of 150 mm, spherical radius of 1 499.7 mm and aspheric coefficient of -1 is performed. The measurement result is coincident with the result of profilograph.
王虹, 钱晓凡, 庞永杰, 张永安. 一种离轴计算全息图在凹非球面检测中的应用[J]. 光学与光电技术, 2011, 9(1): 60. WANG Hong, QIAN Xiao-fan, PANG Yong-jie, ZHANG Yong-an. Application of Off-Axis CGH to Aspheric Surface Test[J]. OPTICS & OPTOELECTRONIC TECHNOLOGY, 2011, 9(1): 60.
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