分析了影响射流式水冷镜形变的各种因素, 利用ANSYS有限元分析软件, 对各项结构参数对镜体形变的影响进行了数值模拟, 探索出射流式水冷镜结构设计的一般规律, 得到了镜体结构的优化设计方案。数值结果表明：在镜体直径80 mm、镜面净吸收功率100 W、光斑直径25 mm、使用硅作为镜体材料的情况下, 射流式水冷镜镜面最大形变可低至0.07 μm, 明显优于其它类型的水冷镜。

Factors which have influences on the deformation of the water jet cooled mirror were analyzed. Numerical simulations of corresponding structural parameters were then made to explore general design laws of the water jet cooled mirror and an optimized scheme was achieved. The results show that, the maximum mirror surface deformation can be reduced to 0.07 μm under the conditions of 100 W net absorption power and 25 mm spot diameter, when the water jet cooled mirror is 80 mm in diameter with silicon as mirror material.