光学技术, 2011, 37 (3): 362, 网络出版: 2011-05-30
多用途、模块化哈特曼波前传感器的研制
Develop of multi-application and modular Hartmann wavefront sensor
哈特曼波前传感器 模块化设计 波像差检测 面形检测 Shack-Hartmann wavefront sensor modular design wavefront error test surface error test
摘要
分析了哈特曼传感器的主要设计指标, 介绍了设计研制的一种多用途、模块化哈特曼传感器, 通过将传感器的主要部件, 包括光源、准直镜、分光棱镜、缩束光路、微透镜阵列及相机等进行模块化设计, 根据不同需求, 对各模块增减或更换, 实现了一套传感器多种用途的应用。并用该传感器进行了系统波像差及光学元件面形检测实验, 通过与Zygo干涉仪的测量结果对比, 得出该传感器测量精度λ/50 RMS。
Abstract
The primary performance parameters of Shack-Hartmann sensor are analyzed. A kind of modular and multi-application Hartmann sensor is introduced. The primary components of the sensor, including light source, collimate lens, beam splitter, beam reducer, microlens array, camera and etc are modular designed. Through adding, reducing, or replacing each module according to different requirement, the sensor can be used in multi-field. The experiment of wavefront error test and surface error test are implemented using the Hartmann sensor, and the results are compared with Zygo interferometer. The experiment results show that the accuracy of the Hartmann sensor is better than λ/50 RMS.
李宏壮, 刘欣悦, 王志臣, 王建立. 多用途、模块化哈特曼波前传感器的研制[J]. 光学技术, 2011, 37(3): 362. LI Hongzhuang, LIU Xinyue, WANG Zhichen, WANG Jianli. Develop of multi-application and modular Hartmann wavefront sensor[J]. Optical Technique, 2011, 37(3): 362.
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