以正硅酸乙酯(TEOS)为有机硅源,乙醇为溶剂,NH3·H20和HCl为催化剂,采用溶胶-凝胶技术,通过调节催化剂控制SiO2纳米颗粒尺度,然后在玻璃上用旋涂法镀膜并对其进行热处理,制备低折射率SiO2减反膜.分别采用椭偏仪和扫描电镜对所制备减反膜的结构、物性进行研究,研究不同性质和剂量的催化剂对薄膜结构、折射率的影响.结果表明：通过控制适量的碱酸催化剂可以制备出低折射率多孔结构的SiO2太阳电池减反膜.

Based on TEOS system and sol-gel process,using solvent alcohol together with catalysts,the microstructure of SiO2 particles in the sol was exactly controlled.Silica coatings were prepared on glass and annealed.The films were characterized by ellipsometer and scanning electronic microscope respectively,the effect of Catalytic agent was investigated,the experimental results show that adjusting catalytic agent can effectively effect the structure of SiO2 thin film.