光学学报, 2011, 31 (6): 0622002, 网络出版: 2011-05-31
基于Zemax的部分补偿透镜的优化设计
Optimization Design of Partially Compensating Lens Based on Zemax
光学设计 部分补偿透镜 剩余波前斜率 弥散圆 optical design partially compensating lens residual wave-front slope dispersive spot
摘要
用部分补偿法检测非球面时,部分补偿透镜的优化设计是关键技术之一。针对这一难点,提出了一种以剩余波前斜率作为优化目标的基于Zemax的部分补偿透镜设计方法,分析了剩余波前斜率与干涉条纹密度以及弥散圆之间的关系,得到了弥散圆可以定量表征剩余波前斜率的结论,并将弥散圆半径作为优化函数。针对3种不同参数的非球面进行了部分补偿透镜的优化设计,设计结果表明,该方法可在保证干涉条纹可探测的前提下,简单、快速、全面直观地实现部分补偿透镜的优化设计,减小剩余波前斜率,降低干涉条纹密度,从而扩大干涉仪可测非球面面形误差的测量范围,提高可测的空间频率。
Abstract
Optimization design of partially compensating lens is one of the key problems for aspheric surface testing using partially compensating lens. A design method for the partially compensating lens based on Zemax, which takes the slope of wave-front as the optimization objective, is proposed. First the relation among residual wave-front slope, and interference fringe density and dispersive spot are analyzed, leading to the conclusion that the dispersive spot can quantitatively characterize the residual wave-front slope and its radius is taken as the optimization target. Then the method is applied to the optimization design of partially compensating lenses corresponding to three kinds of aspheric surfaces. The results indicate that, on the precondition that the interference fringes are detectable, the method can help complete the optimization design of partially compensating lens more simply, faster and more visually, resulting in decrease of the residual wave-front slope and reduction in the interference fringes density. Therefore, the measurement range of the interferometer for testing aspheric surface is expanded, and aspheric surfaces with higher spatial frequency can still be measured without increasing the resolution of interferogram detector.
孟晓辰, 郝群, 朱秋东, 胡摇. 基于Zemax的部分补偿透镜的优化设计[J]. 光学学报, 2011, 31(6): 0622002. Meng Xiaochen, Hao Qun, Zhu Qiudong, Hu Yao. Optimization Design of Partially Compensating Lens Based on Zemax[J]. Acta Optica Sinica, 2011, 31(6): 0622002.