以蓝宝石（Al2O3）为衬底材料，通过软件设计和模拟，研究了图形衬底（PS）的图案选择、图形原胞尺寸和图形原胞间距大小3个参数对LED出光效率的影响。研究结果表明，原胞半径为1.25 μm，原胞间距为0.5 μm的半球型结构是最优化的图形衬底结构；并且采用湿法刻蚀技术，制备了该结构的LED芯片，测试得到该种LED芯片出光效率较之普通LED芯片提高了33%。分析了PS技术改善LED出光效率的根源在于改善了芯片质量，提高了芯片的内量子效率。

Using sapphire (Al2O3) as the substrate, the influence of the parameters of patterned substrate (PS) such as pattern choice, radius and gap of primitive cell on LED efficiency is studied by software design and simulation. The results indicate that the patterned substrate structurea hemisphere structure whose radius and gap are 1.25 μm and 0.5 μm respectively is the optimal structure. Then the LED of this kind of structure is gotten by means of wet etching, and its efficiency increases by 33% compared with normal LED. The reason why the PS technology can increase LED efficiency is analysed, which is that it can improve the chip quality and increase internal quanntum efficiency.