光电工程, 2011, 38 (6): 110, 网络出版: 2011-07-01
基于激光二维散射原理在线测量表面粗糙度
On-line Measurement of Surface Roughness Based on Laser Two-dimensional Scattering Principle
表面粗糙度 激光散射 二维散射 在线检测 surface roughness laser scattering two-dimensional scattering on-line measurement
摘要
针对现有零件表面粗糙度测量仪器操作复杂, 现场测量能力差的问题, 提出一种基于激光二维散射的在线测量方法, 该方法不仅可以测量表面粗糙度的统计参数, 而且可以反映出表面纹理的形貌特征。在测量中, 用无衍射激光光束作光源, 用高精度的 CCD摄像机作位移传感器, 利用 Matlab进行表面粗糙度测量数据采集与处理, 使表面粗糙度在线检测成为可能。该方法运用模块化设计, 具有结构简单、实时处理能力强、测试精度高、显示结果直观、不会划伤被测件等优点。
Abstract
Referring to the complicated operating and bad field measuring of existing surface roughness, an on-line measurement method is presented based on laser two-dimensional scattering principle. The method proposed can not only measure the surface roughness parameters, but also figure out the surface topography. In this measurement, by using non-diffraction laser beam as light source and high accuracy CCD camera as displacement sensor, and applying the method of signal processing of surface roughness by Matlab, real-time measurement of surface roughness can be realized. This method is realized with modularized design, and has the advantages of simple structure, powerful real-time processing capability, high-precision measurement, visual display, and easy operation, etc.
张秋佳, 赵玉华, 韩冬, 余平, 刘明珠. 基于激光二维散射原理在线测量表面粗糙度[J]. 光电工程, 2011, 38(6): 110. ZHANG Qiu-jia, ZHAO Yu-hua, HAN Dong, YU Ping, LIU Ming-zhu. On-line Measurement of Surface Roughness Based on Laser Two-dimensional Scattering Principle[J]. Opto-Electronic Engineering, 2011, 38(6): 110.