Chinese Optics Letters, 2011, 9 (9): 091601, Published Online: Jul. 13, 2011
Epoxy replication of hard X-ray supermirrors Download: 700次
X射线超反射镜 环氧复制 掠入射X射线反射 原子力显微镜 160.4236 Nanomaterials 220.4241 Nanostructure fabrication 340.7470 X-ray mirrors 180.5810 Scanning microscopy
Abstract
The direct replication of W/Si supermirrors is investigated systematically. W/Si supermirrors are fabricated by direct current (DC) magnetron sputtering technology. After deposition, the supermirrors are replicated from the supersmooth mandrels onto ordinary °oat glass substrates by epoxy replication technique. The properties of the supermirrors before and after the replication are characterized by grazing incidence X-ray reflectometry (GIXR) measurement and atomic force microscope (AFM). The results show that before and after replication, the multilayer structures are almost the same and that the surface roughness is 0.240 and 0.217 nm, respectively, which are close to that of the mandrel. It is demonstrated that the W/Si supermirrors are successfully replicated from the mandrel with good performance.
Fangfang Wang, Wenbin Li, Qiushi Huang, Jingtao Zhu, Baozhong Mu, Zhanshan Wang. Epoxy replication of hard X-ray supermirrors[J]. Chinese Optics Letters, 2011, 9(9): 091601.