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基于相变冷却的大功率二极管激光器技术

Large power diode laser of phase-change cooling

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摘要

设计了一种基于相变冷却方式工作的大功率二极管激光器,该激光器的散热器是基于节流式喷射微槽道相变冷却的原理,使冷却液在微槽中的气化率达到了70%,大幅度提高了冷却效果,减小了冷却液流量,在同样制冷功率条件下,冷却液流量仅为水冷方式的1/10。利用相变冷却器进行了背冷式半导体激光器叠阵封装工艺的研究,采用复合热沉与AuSn硬焊料结合的新型封装工艺,完成了准连续3 kW叠阵的封装。实验测试表明,单元叠阵的输出功率达到3.01 kW,占空比10%,封装间距为1.3 mm,光谱宽度小于3.5 nm。最大功率输出时所需R134a冷却液的流量仅为110 mL/min。

Abstract

By combining the methods of spray cooling heat transfer and micro-grooves phase change heat transfer, we design a heat sink based on throttle microgrooves phase change cooling theory. It has been proved by experiments that the vaporization rate of the coolant in the microgrooves of the cooler had reached 70%. The cooling efficiency increased rapidly while the coolant flow became smaller and the thermal management unit lighter. At the same time, we investigated the packaging of laser diode stacks with back surface cooling heat sink. Using the new technique of compound heat sink, AuSn alloy solder and the multi interface soldering, we completed the packaging of quasi-continuous wave(QCW) 3 kW laser diode stacks, with a packing spacing of 1.3 mm. It has been proved by experiments that this unit stacks device achieved a 3.01 kW peak output power with duty cycle 10%, and the HWFM of spectrum is smaller than 3.5 nm.The flow rate of the coolant R134a is 110 mL/min, which is about 10 times lower than that of water.

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中图分类号:TN248.4

DOI:10.3788/hplpb20112307.1823

所属栏目:高功率激光与光学

基金项目:国家自然科学基金重大项目(60890201)

收稿日期:2010-11-22

修改稿日期:2011-03-28

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作者单位    点击查看

高松信:中国工程物理研究院 应用电子学研究所, 四川 绵阳 621900
武德勇:中国工程物理研究院 应用电子学研究所, 四川 绵阳 621900
曹宏章:中国科学院 工程热物理研究所, 北京 100190
王宏:重庆大学 工程热物理研究所, 重庆 400030
李弋:中国工程物理研究院 应用电子学研究所, 四川 绵阳 621900
杨波:中国工程物理研究院 应用电子学研究所, 四川 绵阳 621900
刘军:中国工程物理研究院 应用电子学研究所, 四川 绵阳 621900
唐淳:中国工程物理研究院 应用电子学研究所, 四川 绵阳 621900

联系人作者:高松信(xingao995@sohu.com)

备注:高松信(1975—),男,副研究员,硕士,主要从事高功率半导体激光器研究

【1】Karni Y, Klumel G, Levy M, et al. Active cooling solutions for high power laser diodes stacks[C]//Proc of SPIE.2008:687604.

【2】Feldman N. Highly efficient and reliable 1 kW QCW laser stacks with diffraction limited fast axis beam collimation[C]// Proc of SPIE.2007:64561C.

【3】Klumel G, Karni Y. High duty cycle hard soldered kilowatt laser diode arrays[C]//Proc of SPIE.2010:75830C.

【4】Leers M. Expansion-matched passively cooled heat sinks with low thermal resistance for high-power diode laser bars[C]//Proc of SPIE.2006:610403.

【5】Agostini B, Thome J R, Fabbri M, et al. high heat flux two-phase cooling in silicon multimicrochannels[J].Trans on Components and Packaging Technologies,2008,31(3):691-701.

【6】高松信,武德勇,王骏,等.高功率二极管激光器封装的多层焊接技术[J].强激光与粒子束,2003,15(5):447-449.(Gao Songxin,Wu Deyong,Wang Jun,et al. Multiplayer bonding technique for high power diode laser package.High Power Laser and Particle Beams,2003,15(5):447-449)

【7】Reichert P, Fouksman M, Zhou Hailong, et al. Scalable high power (>1 kW/cm2) diode laser stacks based on silicon monolithic micro-channel coolers[C]//Proc of SPIE.2007:64560I.

【8】高松信,雷军,郭林辉,等.连续100 W量子阱二极管激光器封装工艺[J].强激光与粒子束,2010,22(11):2510-2512.(Gao Songxin, Lei Jun,Guo Linhui,et al. Packaging technic of 100 W quantum-well diode laser.High Power Laser and Particle Beams,2010,22(11):2510-2512)

引用该论文

Gao Songxin,Wu Deyong,Cao Hongzhang,Wang Hong,Li Yi,Yang Bo,Liu Jun,Tang Chun. Large power diode laser of phase-change cooling[J]. High Power Laser and Particle Beams, 2011, 23(7): 1823-1826

高松信,武德勇,曹宏章,王宏,李弋,杨波,刘军,唐淳. 基于相变冷却的大功率二极管激光器技术[J]. 强激光与粒子束, 2011, 23(7): 1823-1826

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