利用表面放电光泵浦技术，研制了重频XeF(C-A)激光器，运行频率达到10 Hz。研究了运行频率、气体流量对激光输出能量稳定性的影响，分析了影响输出稳定性的主要因素,实验结果表明，提高气流量可有效改善重频输出能量的稳定性。同时，还给出了优化实验条件下不同运行频率连续20个脉冲较为理想的输出结果。运行频率分别为1，2，5 Hz时，输出能量稳定性较好，输出能量大于4.0 J；气流量大于53 L/s时，10 Hz重频运行的输出稳定性已显著提高，平均输出能量也达到1.8 J

Taking advantage of the technique of surface discharge optical pumping, a XeF(C-A) laser which can operate in the repetition mode is developed. The maximal repetitive rate is up to 10 Hz. The influence of repetitive rate and gas flow rate on the stability of output energy is studied and the main factors which influence the stability of output energy are analyzed. The experimental results show that increasing the gas feed rate into laser chamber can improve the stability of output energy. The ideal output energy results of 20 laser pulses under different repetitive rate and optimal experimental conditions are given. Output energy more than 4 J and better stability can be obtained when laser device runs at 1, 2 and 5 Hz, respectively. When the gas feed rate is larger than 53 L/s, the stability of output energy is improved obviously at the repetitive rate of 10 Hz, and the average output energy of 20 laser pulses is up to than 1.8 J.