半导体光子学与技术, 1999, 5 (4): 193, 网络出版: 2011-08-08
Optimization Design of Silicon Micro-capacitive Accelerometer with PWM Technique
Optimization Design of Silicon Micro-capacitive Accelerometer with PWM Technique
摘要
Abstract
The property of silicon micro-capacitive accelerometer is analyzed and discussed by establishing the model of the sensor,to lay a basis for optimization design of sensor system structure. Discussed issues include the static modeling and dynamic behavior of the two commonly used structures,i.e., double-cantilever supported and four-beam supported structures, and also the measurement range of these devices.
WU Ying, JIANG Yong-qing, WEN Zhi-yu, HU Song. Optimization Design of Silicon Micro-capacitive Accelerometer with PWM Technique[J]. 半导体光子学与技术, 1999, 5(4): 193. WU Ying, JIANG Yong-qing, WEN Zhi-yu, HU Song. Optimization Design of Silicon Micro-capacitive Accelerometer with PWM Technique[J]. Semiconductor Photonics and Technology, 1999, 5(4): 193.